Boron trichloride (BCl3)wani fili ne na inorganic wanda aka saba amfani dashi a cikin bushewar etching da tsarin tururi na sinadarai (CVD) a masana'antar semiconductor. Gas ne mara launi tare da ƙaƙƙarfan ƙamshi mai zafi a cikin ɗaki kuma yana kula da iska mai ɗanɗano saboda yana samar da hydrochloric acid da boric acid.

Aikace-aikace na Boron Trichloride

A cikin masana'antar semiconductor,Boron trichlorideAn fi amfani dashi don bushe etching na aluminum kuma azaman dopant don samar da yankuna na nau'in P akan wafers na silicon. Hakanan za'a iya amfani da shi don ƙirƙira kayan kamar GaAs, Si, AlN, da azaman tushen boron a wasu takamaiman aikace-aikace. Bugu da kari, ana amfani da sinadarin boron trichloride sosai wajen sarrafa karafa, masana'antar gilashi, nazarin sinadarai da binciken dakin gwaje-gwaje.

Tsaron Boron Trichloride

Boron trichlorideyana da lalacewa kuma mai guba kuma yana iya haifar da mummunar lalacewa ga idanu da fata. Yana hydrolyzs a cikin iska mai danshi don sakin iskar hydrogen chloride mai guba. Don haka, ana buƙatar ɗaukar matakan tsaro da suka dace yayin gudanar da suBoron trichloride, ciki har da sanya tufafin kariya, tabarau da kayan kariya na numfashi, da kuma aiki a cikin yanayi mai kyau.