Gas na musammanbambanta da na gaba ɗayaiskar gas na masana'antua cikin cewa suna da amfani na musamman kuma ana amfani da su a wasu fannoni na musamman. Suna da takamaiman buƙatu don tsabta, abun ciki na ƙazanta, abun da ke ciki, da kaddarorin jiki da sinadarai. Idan aka kwatanta da gas ɗin masana'antu, iskar gas na musamman sun fi bambanta iri-iri amma suna da ƙaramin samarwa da tallace-tallace.

Thegauraye gaskumadaidaitattun iskar gasmu yawanci amfani ne muhimman sassa na musamman gas. Gas ɗin da aka gauraya yawanci ana raba su zuwa gases gama-gari da gaurayewar iskar lantarki.

Gabaɗayan gaurayawan iskar gas sun haɗa da:Laser gauraye gas, Gane kayan aiki gauraye gas, walda gauraye gas, adana gauraye gas, lantarki tushen gas gauraye, likita da nazarin halittu cakuda gas, disinfection da sterilization gauraye gas, kayan aiki ƙararrawa gauraye gas, high-matsi gauraye gas, da sifili-sa iska.

Haɗaɗɗen gas ɗin lantarki sun haɗa da gauran gas na epitaxial, gauran iskar gas ɗin tururin sinadarai, gauran gas ɗin doping, gauran gas ɗin etching, da sauran gaurayawar iskar gas. Waɗannan gaurayawar iskar gas suna taka muhimmiyar rawa a cikin masana'antar semiconductor da microelectronics kuma ana amfani da su sosai a cikin manyan da'irar haɗaɗɗiyar haɗaɗɗiyar (LSI) da masana'anta masu girma dabam (VLSI), da kuma samar da na'urorin semiconductor.

5 Nau'o'in iskar gas mai gaurayawan iskar gas ne aka fi amfani da su

Doping gauraye gas

A cikin kera na'urorin semiconductor da haɗaɗɗun da'irori, ana shigar da wasu ƙazanta a cikin kayan semiconductor don ba da ƙarfin aiki da tsayayyar da ake so, yana ba da damar kera na'urori masu ƙarfi, mahaɗar PN, yadudduka da aka binne, da sauran kayan. Gas ɗin da ake amfani da su a cikin tsarin doping ana kiran su dopant gas. Wadannan iskar gas da farko sun hada da arsine, phosphine, phosphorus trifluoride, phosphorus pentafluoride, arsenic trifluoride, arsenic pentafluoride,boron trifluoride, da diborane. Tushen dopant galibi ana haɗe shi da iskar gas mai ɗaukar nauyi (kamar argon da nitrogen) a cikin ma'ajin tushe. Daga nan sai a ci gaba da yin allurar gauran gas ɗin a cikin tanderun da ke yaɗuwa kuma yana yawo a kusa da wafer, yana ajiye dopant a saman wafer. Dopant ɗin yana amsawa da silicon don samar da ƙarfe mai dopant wanda ke ƙaura zuwa cikin silicon.

Epitaxial girma gas cakuda

Girman Epitaxial shine tsarin adanawa da girma kayan kristal guda ɗaya akan saman ƙasa. A cikin masana'antar semiconductor, iskar gas ɗin da ake amfani da su don girma ɗaya ko fiye yadudduka na abu ta yin amfani da bayanan tururin sinadarai (CVD) akan wani yanki da aka zaɓa a hankali ana kiransa gases epitaxial. Gases na epitaxial na silicon na yau da kullun sun haɗa da dihydrogen dichlorosilane, silicon tetrachloride, da silane. Ana amfani da su da farko don shigar da siliki na epitaxial, jigilar siliki na polycrystalline, jigilar fim ɗin silicon oxide, jigon fim ɗin silicon nitride, da amorphous siliki na fim ɗin amorphous don ƙwayoyin hasken rana da sauran na'urori masu ɗaukar hoto.

Ion shigar gas

A cikin na'urar semiconductor da haɗaɗɗen kera da'ira, iskar gas ɗin da aka yi amfani da su a cikin tsarin dasa ion ana kiransu gaba ɗaya gases dasa ion. Abubuwan da ba su da ionized (irin su boron, phosphorus, da ions arsenic) ana haɓaka su zuwa babban matakin makamashi kafin a dasa su a cikin ƙasa. Fasahar dasa ion an fi amfani da ita don sarrafa wutar lantarki. Ana iya ƙididdige adadin ƙazanta da aka dasa ta hanyar auna ƙarfin ƙarfin ion. Gas ɗin dasa ion yawanci sun haɗa da iskar phosphorus, arsenic, da iskar boron.

Etching gauraye gas

Etching shine tsarin cirewa saman da aka sarrafa (kamar fim ɗin ƙarfe, fim ɗin silicon oxide, da sauransu) akan abin da ba a rufe shi ta hanyar photoresisist, yayin da yake adana wurin da aka rufe ta hanyar photoresist, ta yadda za a sami tsarin da ake buƙata na hoto akan saman ƙasa.

Sinadarin Tururi Zubar da Gas Cakudar

Tsarin tururi na sinadari (CVD) yana amfani da mahadi masu canzawa don saka abu ɗaya ko fili ta hanyar halayen sinadarai na tururi-lokaci. Wannan hanya ce ta samar da fim wacce ke amfani da halayen sinadarai na tururi-lokaci. Gas ɗin CVD da aka yi amfani da su sun bambanta dangane da nau'in fim ɗin da aka kafa.