Laser gas

Ana amfani da gas ɗin Laser galibi don cirewar laser da gas ɗin lithography a cikin masana'antar lantarki. Amfana daga keɓancewar fuskar wayar hannu da faɗaɗa wuraren aikace-aikacen, za a ƙara faɗaɗa sikelin kasuwar polysilicon mai ƙarancin zafin jiki, kuma tsarin cire laser ya inganta aikin TFTs sosai. Daga cikin neon, fluorine, da iskar argon da aka yi amfani da su a cikin Laser excimer na ArF don kera semiconductor, neon yana da fiye da kashi 96% na cakuda gas ɗin Laser. Tare da gyaran fasaha na semiconductor, amfani da laser eximer ya karu, kuma ƙaddamar da fasahar watsawa sau biyu ya haifar da karuwa mai yawa a cikin buƙatun gas na Neon da Laser na ArF excimer ya cinye. Fa'ida daga haɓaka haɓakar iskar gas na musamman na lantarki, masana'antun cikin gida za su sami mafi kyawun sararin ci gaban kasuwa a nan gaba.

Injin lithography shine ainihin kayan aikin masana'antar semiconductor. Lithography yana bayyana girman transistor. Haɗin haɗin kai na sarkar masana'antar lithography shine mabuɗin ci gaban injin lithography. Abubuwan da suka dace da semiconductor irin su photoresist, photolithography gas, photomask, da sutura da kayan haɓakawa suna da babban abun ciki na fasaha. Gas na lithography shine iskar gas wanda injin lithography ke haifar da laser mai zurfi na ultraviolet. Gas na lithography daban-daban na iya samar da hasken haske na tsawon mabambantan raƙuman ruwa, kuma tsayinsu kai tsaye yana rinjayar ƙudurin na'urar lithography, wanda shine ɗayan jigon na'urar lithography. A cikin 2020, jimillar tallace-tallace na injunan lithography na duniya zai zama raka'a 413, wanda tallace-tallacen ASML 258 ya kai kashi 62%, tallace-tallacen Canon raka'a 122 ya kai 30%, da Nikon tallace-tallace 33 raka'a ya kai 8%.