Halaye da halaye na hydrogen chloride na lantarki da aikace-aikacensa a cikin semiconductors

Hydrogen chlorideiskar gas ce mara launi mai ƙamshi mai kamshi. Maganin ruwan da ke cikinta ana kiransa da hydrochloric acid, wanda kuma aka sani da hydrochloric acid. Hydrogen chloride yana narkewa sosai a cikin ruwa. A zafin 0°C, ruwa 1 zai iya narkar da kimanin lita 500 na hydrogen chloride.

Yana da waɗannan halaye da halaye:

1. Tsarkakakken tsarki

Tsarkakakken matakin lantarkihydrogen chlorideyana da yawa sosai, yawanci a matakin ppm ko ƙasa da haka, don tabbatar da cewa babu wani ƙazanta da aka shigar a cikin tsarin kera semiconductor.

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2. Rashin iya aiki

Iskar gas ce mai guba wadda ba ta amsawa da wasu abubuwa da yawa, wanda yake da matuƙar muhimmanci don hana gurɓatar kayan semiconductor da kayan aiki.

3. Babban kwanciyar hankali

Matsayin lantarkihydrogen chloridegabaɗaya yana da sinadarai masu ƙarfi don tabbatar da ingantaccen aikin semiconductor.

A cikin aikin semiconductor, manyan aikace-aikacen hydrogen chloride na lantarki sun haɗa da:

1. Tsaftace saman da kuma shiryawa

A matsayin ingantaccen mai tsabtace saman, matakin lantarkihydrogen chlorideAna amfani da shi don cire oxides da ƙazanta daga saman substrate don tabbatar da inganci da tsarkin Layer ko fim ɗin epitaxial.

2. Taimakon ci gaban epitaxial

Ana amfani da shi azaman maganin shafawa a saman fata a cikin tsarin epitaxial, yana taimakawa wajen inganta ingancin layin epitaxial, inganta daidaitawar lattice, da rage samuwar lahani na lattice.

3. Maganin da aka yi kafin a yi amfani da shi

Kafin shirya na'urorin semiconductor, matakin lantarkihydrogen chlorideana iya amfani da shi don magance saman substrate don samar da tushe mai ƙarfi don inganta mannewa tsakanin Layer na epitaxial da substrate.

4. Maganin tallafi na cirewa

A cikin tsarin adana tururin sinadarai (CVD) ko adana tururin jiki (PVD), ana iya amfani da hydrogen chloride na lantarki azaman hanyar canja wurin yanayin iskar gas don shiga cikin amsawar adana kayan semiconductor.

5. Wakilin canja wurin iskar gas

A matsayin wakilin canja wurin iskar gas, ana shigar da wasu abubuwan da suka riga suka fara aiki a cikin ɗakin amsawa don taimakawa wajen daidaita yawan ajiyar kayan da kuma daidaiton kayan.

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Waɗannan halaye suna sanya darajar lantarkihydrogen chloridewani muhimmin wakili na sarrafawa a fasahar semiconductor, wanda ke da babban tasiri akan aiki da amincin na'urar ƙarshe.

Baya ga amfani da shi a sarrafa semiconductor, hydrogen chloride na lantarki na iya samun amfani iri-iri a wasu fannoni, gami da: Shirye-shiryen kayan tsafta masu ƙarfi, Kwayoyin Man Fetur, haɓakar kayan Semiconductor, Lithography na Lokacin Vapor, Nazarin Kayan Aiki, Binciken Sinadarai.

Gabaɗaya, matakin lantarkihydrogen chlorideiskar gas ce mai yawan amfani, mai tsafta wadda ke da aikace-aikace iri-iri a wajen kera semiconductor.


Lokacin Saƙo: Disamba-17-2024