Hydrogen chlorideiskar gas ce mara launi mai kamshi. Maganin ruwansa ana kiransa hydrochloric acid, wanda kuma aka sani da hydrochloric acid. Hydrogen chloride yana narkewa sosai a cikin ruwa. A 0 ° C, ƙarar ruwa 1 na iya narkar da kusan 500 na hydrogen chloride.
Yana da kaddarorin da halaye masu zuwa:
1. Tsafta mai girma
Tsabtace darajar lantarkihydrogen chlorideyana da girma sosai, yawanci a ppm ko ƙananan matakin, don tabbatar da cewa ba a shigar da ƙazanta a cikin tsarin masana'antar semiconductor.
2. Rashin hankali
Yana da iskar gas wanda ba ya aiki tare da wasu abubuwa da yawa, wanda ke da mahimmanci don hana gurɓata kayan aikin semiconductor da kayan aiki.
3. Babban kwanciyar hankali
Matsayin lantarkihydrogen chloridegabaɗaya yana da tsayayyen sunadarai don tabbatar da ingantaccen sarrafa semiconductor.
A cikin sarrafa semiconductor, manyan aikace-aikacen lantarki na hydrogen chloride sun haɗa da:
1. Tsabtace sararin samaniya da shiri
A matsayin ingantaccen mai tsabtace ƙasa, darajar lantarkihydrogen chlorideana amfani da shi don cire oxides da ƙazanta daga farfajiyar ƙasa don tabbatar da inganci da tsabta na epitaxial Layer ko fim.
2.Epitaxial girma taimako
An yi amfani da shi azaman wakili na gyaran fuska a cikin tsari na epitaxial, yana taimakawa wajen inganta yanayin launi na epitaxial, inganta haɓakar lattice, da rage samuwar lahani.
3. Substrate pretreatment
Kafin shirye-shiryen na'urorin semiconductor, darajar lantarkihydrogen chlorideza a iya amfani da su bi da substrate surface don samar da wani barga tushe don inganta adhesion tsakanin epitaxial Layer da substrate.
4. Deposition mai taimako wakili
A cikin aiwatar da isassun tururi na sinadarai (CVD) ko ajiyar tururi ta jiki (PVD), ana iya amfani da darajar hydrogen chloride a matsayin matsakaicin canja wurin lokaci na iskar gas don shiga cikin shigar da kayan semiconductor.
5. Gas-lokaci canja wurin wakili
A matsayin wakili na canja wurin lokaci na iskar gas, ana gabatar da sauran abubuwan da ke haifar da iskar gas a cikin ɗakin amsawa don taimakawa daidaita ƙimar ajiya da daidaiton kayan.
Waɗannan halayen suna yin darajar lantarkihydrogen chloridewani muhimmin wakili mai sarrafawa a cikin fasahar semiconductor, wanda ke da tasiri mai mahimmanci akan aiki da amincin na'urar ƙarshe.
Baya ga amfani da shi wajen sarrafa semiconductor, darajar lantarki hydrogen chloride na iya samun nau'ikan amfani da yawa a wasu yankuna, gami da: Shirye-shiryen kayan tsabta mai tsabta, Kwayoyin Fuel, Ci gaban kayan abu na Semiconductor, Lithography na Vapor Phase, Analysis Material, Chemical Research.
Gabaɗaya, darajar lantarkihydrogen chlorideis a m, high tsarki gas cewa yana da fadi da kewayon aikace-aikace waje na semiconductor masana'antu.
Lokacin aikawa: Dec-17-2024