Tungsten hexafluoride (WF6) ana ajiye shi a saman wafer ta hanyar CVD, yana cika ramukan haɗin gwiwar ƙarfe, da ƙirƙirar haɗin ƙarfe tsakanin yadudduka.
Bari mu fara magana game da plasma. Plasma wani nau'i ne na kwayoyin halitta wanda akasari ya ƙunshi electrons kyauta da ions masu caji. Yana wanzuwa ko'ina a sararin samaniya kuma galibi ana ɗaukarsa azaman yanayi na huɗu na kwayoyin halitta. Ana kiranta jihar plasma, kuma ana kiranta "Plasma". Plasma yana da babban ƙarfin lantarki kuma yana da tasiri mai ƙarfi tare da filin lantarki. Gas ne wani bangare na ionized, wanda ya ƙunshi electrons, ions, free radicals, tsaka tsaki, da photons. Plasma kanta cakuda ce ta tsaka tsaki ta lantarki mai ƙunshe da ɓangarorin jiki da sinadarai.
Madaidaicin bayani shine cewa a karkashin aikin babban makamashi, kwayoyin za su shawo kan karfin van der Waals, karfin haɗin sinadarai da Coulomb Force, kuma ya gabatar da wani nau'i na wutar lantarki mai tsaka tsaki gaba ɗaya. A lokaci guda kuma, ƙarfin ƙarfin da waje ke bayarwa ya shawo kan ƙarfin uku na sama. Aiki, electrons da ions suna ba da yanayi na kyauta, wanda za'a iya amfani da shi ta hanyar wucin gadi a ƙarƙashin ƙirar filin maganadisu, kamar tsarin etching semiconductor, tsarin CVD, PVD da tsarin IMP.
Menene babban makamashi? A ka'idar, ana iya amfani da duka babban zafin jiki da babban mitar RF. Gabaɗaya magana, babban zafin jiki yana kusan yiwuwa a cimma. Wannan yanayin zafin da ake buƙata ya yi yawa kuma yana iya kasancewa kusa da zafin rana. Yana da wuya a samu a cikin tsari. Saboda haka, masana'antu yawanci suna amfani da babban mitar RF don cimma ta. Plasma RF na iya kaiwa sama da 13MHz+.
Tungsten hexafluoride an yi amfani da plasma a ƙarƙashin aikin filin lantarki, sa'an nan kuma an ajiye tururi ta filin maganadisu. W atoms sun yi kama da gashin fuka-fukan Goose na hunturu kuma sun faɗi ƙasa ƙarƙashin aikin nauyi. Sannu a hankali, ana ajiye ƙwayoyin W a cikin ramuka, kuma a ƙarshe sun cika ta cikin ramuka don samar da haɗin gwiwar ƙarfe. Baya ga saka W atom a cikin ramukan, shin za a kuma ajiye su a saman Wafer? Ee, tabbas. Gabaɗaya magana, zaku iya amfani da tsarin W-CMP, wanda shine abin da muke kira tsarin niƙa don cirewa. Yana kama da yin amfani da tsintsiya don share ƙasa bayan dusar ƙanƙara mai yawa. Dusar ƙanƙara da ke ƙasa tana sharewa, amma dusar ƙanƙara a cikin rami a ƙasa za ta kasance. Kasa, kusan iri daya.
Lokacin aikawa: Dec-24-2021
