Amfani da Tungstar Hexafluoride (Wf6)

Tungten Hexafluoride (WF6) an adana shi a saman wafer ta hanyar tsari na CVD, yana cika ramukan dajin haɗin ƙarfe tsakanin yadudduka.

Bari muyi magana game da plasma da farko. Plasma wani nau'i ne na kwayoyin halitta yafi dacewa da wutan lantarki da kuma aka caje ions. Ya wanzu cikin sararin samaniya kuma ana ɗaukarsu a matsayin yanayin na huɗu. Ana kiranta jihar Plasma, wanda kuma ake kira "plasma". Plasma yana da babban aikin lantarki kuma yana da ƙarfi mai yawa tare da filin lantarki. Gas ne na ainihi, wanda ya kunshi wayoyin lantarki, ions, radicals kyauta, barbashi mai tsaka-tsaki, da kuma pherde. Plasma kanta shine cakuda tsaka tsaki na lantarki wanda ya ƙunshi a zahiri da kuma kimanin barbashi.

Bayanin kai tsaye shine cewa a karkashin aikin babban makamashi, kwayoyin za su yi nasara da karfi Van Der Waals, kuma ya fi karfin wutar lantarki, kuma a gabatar da wani yanki mai tsallakewa mai tsaka tsaki gaba daya. A lokaci guda, babban makamashi wanda ya hana ta waje yana maye gurbin da sojojin uku da ke sama. Aiki, wayoyin hannu da kuma ions suna ba da wata ƙasa ta kyauta, wanda za'a iya amfani da shi a ƙarƙashin yanayin filin Magnetic, kamar yadda ake aiwatar da tsari, PVD da kuma tsari.

Menene babban makamashi? A ka'idar, duka zazzabi mai zafi da yawan mitar RF ana iya amfani dasu. Gabaɗaya magana, zazzabi mai zafi kusan ba zai yiwu a cimma ba. Wannan buƙatun zafin jiki ya yi yawa kuma yana iya zama kusa da zafin rana. Yana da galibi ba zai yiwu a cimma aiki ba. Sabili da haka, masana'antu yawanci tana amfani da babban abin hawa don cimma shi. Plasma RF na iya kaiwa har zuwa 13mhz +.

Taddnete Hexafluoride yana da playuna a ƙarƙashin aikin filin lantarki, sannan kuma filin da aka ajiye ta filin magnetic. W atoms suna kama da gashin tsuntsayen Goose na gashin wuta kuma sun faɗi ƙasa a ƙasa a ƙarƙashin aikin nauyi. Sannu a hankali, an ajiye atoms a cikin ramuka, kuma a ƙarshe cike cikakken cika ta ramuka don samar da bayanan haɗin ƙarfe. Baya ga adana w cloms a cikin ramuka, za a adana su a saman wafer? Ee, tabbas. Gabaɗaya magana, zaku iya amfani da tsarin W-CMP, wanda muke kira tsarin nisan na injin na injin don cirewa. Ya yi kama da amfani da tsintsiya don share bene bayan dusar ƙanƙara mai nauyi. Dusar ƙanƙara a ƙasa aka shafe, amma dusar ƙanƙara a cikin rami a ƙasa zai kasance. Ƙasa, kusan iri ɗaya ne.