Ana sanya tungsten hexafluoride (WF6) a saman wafer ɗin ta hanyar tsarin CVD, yana cike ramukan haɗin ƙarfe, kuma yana samar da haɗin ƙarfe tsakanin layuka.
Bari mu fara magana game da plasma. Plasma wani nau'i ne na matter wanda galibi ya ƙunshi free electrons da ions masu caji. Yana wanzuwa sosai a sararin samaniya kuma galibi ana ɗaukarsa a matsayin yanayi na huɗu na matter. Ana kiransa da yanayin plasma, wanda kuma ake kira "Plasma". Plasma yana da babban ƙarfin lantarki kuma yana da ƙarfi wajen haɗa kai da filin lantarki. Iskar gas ce mai ionized, wadda ta ƙunshi electrons, ions, free radicals, neutral barbashi, da photons. Plasma kanta cakuda ce mai tsaka tsaki ta lantarki wadda ta ƙunshi barbashi masu aiki a zahiri da kuma a sinadarai.
Bayanin da aka bayar a fili shi ne cewa a ƙarƙashin tasirin babban makamashi, ƙwayar za ta shawo kan ƙarfin van der Waals, ƙarfin haɗin sinadarai da ƙarfin Coulomb, kuma ta gabatar da wani nau'in wutar lantarki mai tsaka-tsaki gaba ɗaya. A lokaci guda, babban kuzarin da waje ke bayarwa ya shawo kan ƙarfin da ke sama guda uku. Aiki, electrons da ions suna gabatar da yanayi na 'yanci, wanda za a iya amfani da shi ta hanyar wucin gadi a ƙarƙashin canjin filin maganadisu, kamar tsarin etching na semiconductor, tsarin CVD, tsarin PVD da IMP.
Menene babban makamashi? A ka'ida, ana iya amfani da babban zafin jiki da babban mitar RF. Gabaɗaya, babban zafin jiki kusan ba zai yiwu a cimma shi ba. Wannan buƙatar zafin jiki ya yi yawa kuma yana iya kasancewa kusa da zafin rana. Ba zai yiwu a cimma shi a cikin wannan tsari ba. Saboda haka, masana'antar yawanci tana amfani da babban mitar RF don cimma shi. Plasma RF na iya kaiwa har zuwa 13MHz+.
Ana yin amfani da sinadarin Tungsten hexafluoride a cikin plasma a ƙarƙashin aikin filin lantarki, sannan a saka tururi ta hanyar amfani da filin maganadisu. Kwayoyin W suna kama da gashin tsuntsayen hunturu kuma suna faɗuwa ƙasa ƙarƙashin aikin nauyi. A hankali, ana saka ƙwayoyin W a cikin ramukan da ke ratsawa, kuma a ƙarshe ana cika ramukan da ke ratsawa don samar da haɗin ƙarfe. Baya ga sanya ƙwayoyin W a cikin ramukan da ke ratsawa, shin za a saka su a saman Wafer? Eh, tabbas. Gabaɗaya, za ku iya amfani da tsarin W-CMP, wanda shine abin da muke kira tsarin niƙa na injiniya don cirewa. Yana kama da amfani da tsintsiya don share ƙasa bayan dusar ƙanƙara mai yawa. Ana share dusar ƙanƙara a ƙasa, amma dusar ƙanƙara a cikin ramin da ke ƙasa za ta kasance. Ƙasa, kusan iri ɗaya ne.
Lokacin Saƙo: Disamba-24-2021
