Gas mai tsabta (UHP) shine jinin rayuwar masana'antar semiconductor. Kamar yadda buƙatun da ba a taɓa ganin irinsa ba ga sarƙoƙin samar da kayayyaki na duniya suna haɓaka farashin iskar gas mai tsananin ƙarfi, sabbin ƙirar ƙirar semiconductor da ayyukan masana'antu suna haɓaka matakin sarrafa gurɓataccen iska da ake buƙata. Ga masana'antun semiconductor, samun damar tabbatar da tsabtar gas na UHP yana da mahimmanci fiye da kowane lokaci.

Gas Masu Tsabtace Tsabtace (UHP) Suna da Mahimmanci a Masana'antar Semiconductor na Zamani

Ɗaya daga cikin manyan aikace-aikacen gas na UHP shine inertization: Ana amfani da iskar UHP don samar da yanayi mai kariya a kusa da sassan semiconductor, don haka kare su daga illar danshi, oxygen da sauran gurɓataccen yanayi. Koyaya, inertization ɗaya ne daga cikin ayyuka daban-daban da iskar gas ke yi a masana'antar semiconductor. Daga gas ɗin plasma na farko zuwa iskar gas ɗin da ake amfani da su a cikin etching da annealing, ana amfani da iskar gas mai matsananciyar matsa lamba don dalilai daban-daban kuma suna da mahimmanci a cikin sarkar samar da semiconductor.

Wasu daga cikin iskar gas na "core" a cikin masana'antar semiconductor sun haɗa danitrogen(an yi amfani dashi azaman tsaftacewa gabaɗaya da iskar gas),argon(an yi amfani da shi azaman iskar plasma na farko a cikin etching da halayen jijiya),helium(amfani dashi azaman iskar gas mara amfani tare da kaddarorin canja wurin zafi na musamman) dahydrogen(yana taka rawa da yawa a cikin cirewa, ajiya, epitaxy da tsaftacewar plasma).

Kamar yadda fasahar semiconductor ta samo asali kuma ta canza, haka iskar gas da ake amfani da su a cikin tsarin masana'antu. A yau, masana'antun masana'antu na semiconductor suna amfani da iskar gas mai yawa, daga iskar gas mai daraja irin sukryptonkumaneonzuwa nau'in amsawa irin su nitrogen trifluoride (NF 3) da tungsten hexafluoride (WF 6).

Bukatar girma don tsabta

Tun da aka kirkiro microchip na kasuwanci na farko, duniya ta ga wani haɓaka mai ban sha'awa na kusa-ƙusa a cikin ayyukan na'urorin semiconductor. A cikin shekaru biyar da suka gabata, ɗaya daga cikin tabbatattun hanyoyin da za a iya cimma wannan nau'in haɓaka aikin ita ce ta hanyar "ƙimar girman girman": rage mahimmin ma'auni na gine-ginen guntu da ake da su don matsi ƙarin transistor zuwa sararin samaniya. Baya ga wannan, haɓaka sabbin gine-ginen guntu da yin amfani da kayan yankan-baki sun haifar da tsalle-tsalle a cikin aikin na'urar.

A yau, mahimmin ma'auni na ƙananan na'urori masu ɗaukar hoto a yanzu sun yi ƙanƙanta wanda girman girman ba shine wata hanyar da za ta iya inganta aikin na'urar ba. Madadin haka, masu binciken semiconductor suna neman mafita a cikin nau'ikan kayan labari da gine-ginen guntu na 3D.

Shekaru goma na sake fasalin da ba gajiyawa yana nufin na'urorin semiconductor na yau sun fi ƙarfin microchips na tsohon - amma kuma sun fi rauni. Zuwan fasahar ƙirƙira wafer 300mm ya haɓaka matakin sarrafa ƙazanta da ake buƙata don masana'antar semiconductor. Ko da ƙarancin gurɓataccen abu a cikin tsarin masana'antu (musamman ƙarancin iskar gas ko iskar gas) na iya haifar da gazawar kayan aikin bala'i - don haka tsabtar iskar gas yanzu ya fi kowane lokaci mahimmanci.

Don masana'antar kera semiconductor na yau da kullun, iskar gas mai tsafta ya rigaya ya zama mafi girman kuɗin kayan bayan silicon kanta. Ana tsammanin waɗannan farashin za su ƙaru ne kawai yayin da buƙatun semiconductor ke haɓaka zuwa sabon tsayi. Abubuwan da ke faruwa a Turai sun haifar da ƙarin cikas ga kasuwar iskar gas mai tsananin zafi. Ukraine na ɗaya daga cikin manyan masu fitar da kayayyaki masu tsafta a duniyaneonalamu; Mamaya na Rasha na nufin ana takurawa samar da iskar gas da ba kasafai ake samu ba. Hakan ya haifar da karanci da hauhawar farashin sauran iskar gas mai daraja kamarkryptonkumaxenon.