A cikin masana'antar tsari na masana'antu na semiconducries tare da in mun gwada da ci gaba ingancin samarwa, ana buƙatar kusan nau'ikan gas 50 daban-daban. Gases ana raba shi cikin gas mai yawa dagas na musamman.

Aikace-aikacen gas a cikin microecondsic masana'antu da ke amfani da gas ya taka muhimmiyar rawa a cikin hanyoyin aiwatar da masana'antu da yawa. Daga Urssi, TFD-LCD ga masana'antu na lantarki (Mems) masana'antu ana amfani da su azaman abubuwan masana'antu, oin hadawa, ion sanya ajiya, da sauransu.

Misali, mutane da yawa sun san cewa kwakwalwan kwamfuta ana yin yashi, amma suna duban tsarin masana'antu, ana yin amfani da kayan, gas, da sauransu ba makawa. Wakilin ƙarewar baya kuma yana buƙatar substrates, Intcomers, jagoran Frames, kayan bonding, da sauransu na kayan daban-daban. Gases na musamman na lantarki sune abubuwa na biyu mafi girma a cikin farashin masana'antar semicontortor bayan silicon sols, waɗanda ke biye da masu daukar hoto.

Tsarkin gas na gas yana da tasiri mai tasiri akan aikin kayan aiki da yawan kayan aikin, da amincin iskar gas yana da alaƙa da lafiyar ma'aikata da amincin aikin masana'antu. Me yasa tsarkakakken gas ke da irin wannan babban tasiri a kan layin aiwatar da ma'aikata? Wannan ba ƙari bane, amma an ƙaddara ta hanyar halayen da suka yi hatsari na gas da kanta.

Classigfication na gases na gama gari a cikin masana'antar semictionectory

Talakawa

Ana kuma kiran iskar gas na yau da kullun: yana nufin gas mai masana'antu tare da zaɓin da aka buƙata fiye da 5n da babban samarwa da kararrawa mai yawa. Ana iya rarrabu cikin gas rabuwa da iskar iska da gas na roba bisa ga hanyoyin shirye-shiryen daban. Hydrogen (H2), nitrogen (N2), oxygen (O2), Argon (a2), da sauransu.;

Gas na musamman

Gas na musamman yana nufin gas na masana'antu wanda ake amfani dashi a takamaiman filaye kuma yana da buƙatu na musamman don tsarkakakkiya, iri-iri, da kaddarorin. A galibanSih4, Ph3, B2h6, A8h3,Hcl, CF4,NH3, POCCL3, SHACCL2, SIhCl3,NH3, BCL3, Sif4, CLF3, CLF3, CO, C2f6, N2o, F2, HF, HBR,SF6... da sauransu.

Iri gas na yaji

Nau'in gas na musamman: lalata, mai guba, mai wuta, tilasta-tallafawa, inert, da sauransu.
An yi amfani da gas na ƙwallon ƙafa na Semicondector ɗin kamar haka:
(i) lalata / toxic:Hcl, Bf3, wf6, HBR, SIH2CCCCCCCCL2, NH3, PH3, CL2,BCL3...
(II) Fasaha: H2,Ch4,Sih4, PH3, Ash3, Sih2Cl2, B2h6, Ch2H2, Ch3F, CO ...
(iii) Haɗin kai: O2, CL2, N2O, NF3 ...
(IV) Makert: N2,CF4, C2F6,C4f8,SF6, CO2,Ne,Kr, Shi ...

A kan aiwatar da tsarin kwastomomi na SeMictionctors na Semiconductor, kusan nau'ikan gas na musamman 50 (ana kiranta gas na musamman) a cikin hanyoyin da ake ciki, da allura, allura, allura, allura, allura, allura, allura, allura, allura, allura, allura, allura, allura, allura, allura, allura, allura, allura, allura, allurar tsari sun wuce daruruwan. Misali, PH3 da Ash3 ana amfani dasu azaman phosphorus da arf4, sf6 da aka saba amfani dasu a cikin aiwatar da fim, F2 / kr / ne, kr / ne a cikin tsarin daukar hoto.

Daga abubuwan da ke sama, zamu iya fahimtar cewa gas da yawa na semiconductortorcast mai cutarwa ga jikin mutum. Musamman, wasu daga cikin gas, kamar Sih4, suna da kafaɗa kai. Muddin sun zuga, za su yi amsawa da ƙarfi tare da isashshen oxygen a cikin iska kuma su fara ƙonewa; da Ash3 yana da guba sosai. Kowane ɗan ƙaramin tsari na iya haifar da lahani ga rayukan mutane, don haka buƙatun don amincin tsarin sarrafawa don amfani da gas na musamman musamman.

Semiconductors suna buƙatar gas-tsarkaka don samun "digiri uku"

Gas da gas

Abubuwan da aka tsirar da yanayin rashin tsabta a cikin gas ana bayyana su azaman kashi na tsarkakan iskar gas, kamar 99.9999%. Gabaɗaya magana, buƙatun tsabta don gas na musamman gas na lantarki ya kai 5n, kuma an bayyana shi ta hanyar girman yanayin rashin abinci ppm (sashi), da PPT (ɓangare), PPT (ɓangare), PPT (ɓangare), PPT (ɓangare). Filin lantarki na lantarki yana da mafi girman buƙatu na tsarkakakkun abubuwa na tsarkakakkun gas na gas na musamman, da kuma tsarkakakken gases na musamman na lantarki yana da girma gaba ɗaya 6n.

Rashin ruwa

Abubuwan da ke ciki na gano ruwa a cikin gas, ko rigar wiwi, galibi ana bayyana shi a cikin Matsi, kamar Atrospheric Dew Point -70 ℃.

M

Yawan ɓarna barbashi a cikin gas, barbashi tare da girman barbashi μm, an bayyana shi a cikin adadin barbashi / m3. Don fitowar iska, ana bayyana shi a cikin MG / M3 na abubuwan da ba makawa mai ƙarfi, wanda ya haɗa da mai.