A cikin aikin masana'antu na masana'antar wafer semiconductor tare da ingantattun hanyoyin samarwa, kusan nau'ikan iskar gas iri 50 ana buƙatar. Gases gabaɗaya sun kasu zuwa manyan iskar gas dagas na musamman.

Aikace-aikacen iskar gas a cikin masana'antar microelectronics da masana'antar semiconductor Amfani da iskar gas koyaushe yana taka muhimmiyar rawa a cikin matakan semiconductor, musamman matakan semiconductor ana amfani da su sosai a masana'antu daban-daban. Daga ULSI, TFT-LCD zuwa masana'antar micro-electromechanical (MEMS) na yanzu, ana amfani da matakan semiconductor azaman matakan masana'anta, gami da bushewar etching, hadawan abu da iskar shaka, ion implantation, jigon fim na bakin ciki, da sauransu.

Misali, mutane da yawa sun san cewa kwakwalwan kwamfuta an yi su ne da yashi, amma idan aka duba gabaɗayan aikin kera guntu, ana buƙatar ƙarin kayan, kamar su photoresist, polishing water, kayan da ake buƙata, iskar gas na musamman, da sauransu. Marufi na baya-baya kuma yana buƙatar maƙalai, masu shiga tsakani, firam ɗin gubar, kayan haɗin gwiwa, da sauransu na kayan daban-daban. Gas na musamman na lantarki shine abu na biyu mafi girma a cikin farashin masana'antar semiconductor bayan wafer silicon, sannan abin rufe fuska da masu ɗaukar hoto.

Tsabtataccen iskar gas yana da tasiri mai mahimmanci akan aikin sashi da yawan amfanin ƙasa, kuma amincin isar gas yana da alaƙa da lafiyar ma'aikata da amincin aikin masana'anta. Me yasa tsarkin iskar gas ke da tasiri sosai akan layin tsari da ma'aikata? Wannan ba ƙari ba ne, amma an ƙaddara shi ta hanyar halayen haɗari na iskar gas kanta.

Rarraba gas gama gari a cikin masana'antar semiconductor

Gas na yau da kullun

Hakanan ana kiran iskar gas na yau da kullun: yana nufin iskar gas na masana'antu tare da buƙatu mai tsabta ƙasa da 5N da babban samarwa da tallace-tallace. Ana iya raba shi zuwa iskar gas na rabuwa da gas na roba bisa ga hanyoyin shirye-shirye daban-daban. Hydrogen (H2), nitrogen (N2), oxygen (O2), argon (A2), da dai sauransu;

Gas na Musamman

Gas na musamman yana nufin iskar gas ɗin masana'antu wanda ake amfani da shi a takamaiman fannoni kuma yana da buƙatu na musamman don tsabta, iri-iri, da kaddarorin. MusammanSiH4, PH3, B2H6, A8H3,HCLCF4 ,NH3, POCL3, SIH2CL2, SIHCL3,NH3, Saukewa: BCL3, SIF4, CLF3, CO, C2F6, N2O, F2, HF, HBR,Farashin SF6…da sauransu.

Nau'in iskar gas

Nau'in iskar gas na musamman: lalata, mai guba, mai ƙonewa, mai goyan bayan konewa, inert, da sauransu.
Gases semiconductor da aka fi amfani da su ana rarraba su kamar haka:
(i) Mai lalacewa/mai guba:HClBF3, WF6, HBr, SiH2Cl2, NH3, PH3, Cl2,BCl3…
(ii) Flammable: H2,CH4,SiH4PH3,AsH3,SiH2Cl2,B2H6,CH2F2,CH3F,CO…
(iii) Mai ƙonewa: O2, Cl2, N2O, NF3…
(iv) Inert: N2,CF4C2F6, ku.C4F8,Farashin SF6CO2,Ne,Kr, Iya…

A cikin aiwatar da masana'antar guntu na semiconductor, ana amfani da kusan nau'ikan iskar gas na musamman guda 50 (wanda ake nufi da iskar gas na musamman) a cikin iskar shaka, watsawa, sanyawa, etching, allura, photolithography da sauran matakai, kuma jimlar matakan aiwatarwa sun wuce ɗaruruwa. Misali, PH3 da AsH3 ana amfani da su azaman phosphorus da tushen arsenic a cikin tsarin dasa ion, Gas na tushen F CF4, CHF3, SF6 da halogen gas CI2, BCI3, HBr ana amfani dasu a cikin tsarin etching, SiH4, NH3, N2O a cikin tsarin fim ɗin jigo, F2/Kr/Ne, Kr/Ne a cikin tsarin daukar hoto.

Daga abubuwan da ke sama, zamu iya fahimtar cewa yawancin iskar gas na semiconductor suna da illa ga jikin mutum. Musamman, wasu daga cikin iskar gas, kamar SiH4, suna kunna kansu. Muddin sun zubo, za su yi da ƙarfi tare da iskar oxygen a cikin iska kuma su fara ƙonewa; kuma AsH3 yana da guba sosai. Duk wani ɗigo kaɗan na iya haifar da lahani ga rayuwar mutane, don haka abubuwan da ake buƙata don amincin tsarin tsarin sarrafawa don amfani da iskar gas na musamman sun fi girma.

Semiconductors suna buƙatar iskar gas mai tsabta don samun "digiri uku"

Gas tsarki

Abubuwan da ke cikin yanayin ƙazanta a cikin iskar gas yawanci ana bayyana su azaman kashi na tsaftar iskar gas, kamar 99.9999%. Gabaɗaya magana, abin da ake buƙata don iskar gas na musamman na lantarki ya kai 5N-6N, kuma ana bayyana shi ta ƙimar ƙayyadaddun yanayin ƙazanta abun ciki ppm (bangaren kowace miliyan), ppb (bangaren biliyan ɗaya), da ppt (ɓanga kowace tiriliyan). Filin semiconductor na lantarki yana da mafi girman buƙatu don tsabta da kwanciyar hankali na iskar gas na musamman, kuma tsaftar iskar gas na musamman gabaɗaya ya fi 6N.

bushewa

Abubuwan da ke cikin ruwa mai ganowa a cikin iskar gas, ko rigar, yawanci ana bayyana su a cikin raɓa, kamar yanayin raɓa na yanayi -70 ℃.

Tsafta

Adadin gurɓataccen gurɓataccen iska a cikin iskar gas, barbashi tare da girman barbashi na µm, an bayyana su a cikin ɓangarorin nawa/M3. Don matsewar iska, yawanci ana bayyana shi a cikin mg/m3 na ƙaƙƙarfan da ba za a iya kaucewa ba, wanda ya haɗa da abun cikin mai.