Mafi yawan adadin gas na musamman - nitrogen brifloride Nf3

Masana'antar masana'antu ta kasarmu ta kasarmu ta ci gaba da babban matakin wadata. Nitrogen Briflutide, a matsayin m da kuma mafi girman girma na lantarki na musamman gas a samarwa da sarrafa bangarori da semicontorors, yana da babban filin kasuwa.

An yi amfani da gasasshen gas na lantarki na musamman sun haɗa dasulfur hexafluoride (sf6), tunsten hexafluoride (wf6),Carbon Tetrafluhlide (CF4), Triflorooromethane (chf3), nitrogen barluorde (nf3), hexfluoroethane (C2F6) da ocafluoropropane (C3F8). Nitrogen Trifluorde (nf3) ana amfani da shi azaman babbar hanyar flafirine mai launin ruwan hydrogen-mrioride masu guba mai kayewa. A ingantaccen sashi (kusan 25%) na makamashin dauki tsakanin H2-O2 da F2 radiation sune mafi kyawun lasrai a cikin lasashen masu sunadarai.

Nitrogen Triflutide shine kyakkyawan plasma plching gas a cikin masana'antar masana'antar koyarwa. Don etching silicon da silicon nitride, nitrogen briflorodede yana da mafi girma etching da carbon tetraflumide da oxbon tetraflumide da oxygen, kuma ba shi da gurbataccen zuwa farfajiya. Musamman ma a cikin etching na kayan da'irar da aka haɗa tare da kauri ƙasa da 1.5um, nitrogen trafloritide yana da matukar kyau a farfajiya na etchy abu, kuma yana da wakili mai kyau mai kyau. Tare da ci gaban Nanotechnology da manyan ci gaban masana'antar lantarki, bukatarsa ​​zata karu kowace rana.

A matsayin nau'in gas mai dauke da gas, nitrogen na musamman (NT3) shine mafi yawan samfurin gas na lantarki a kasuwa. Yana da ereter a zazzabi a daki, mafi aiki fiye da oxygen, da mafi barga fiye da filasta, da sauƙi don sarrafawa a babban zazzabi.

Akai amfani da busassun nitrogen na nitrogen a matsayin mai gas na plasma etch, dace da wuraren masana'antu kamar su, sel na ganima, ƙwayoyin daukar hoto, da sauransu.

Idan aka kwatanta da wasu gas na lantarki, nitrogen na lantarki mai dauke da ingantattun abubuwa kamar silicon nitrie, kuma yana da babban tsabtatawa a farfajiya na etchon, kuma a cikin etching mai tsabta ne a farfajiya kuma zai iya yin gurbata a farfajiya kuma yana iya haduwa da bukatun na tsari tsari.