Mafi girman adadin Gas na Musamman na Lantarki - Nitrogen Trifluoride NF3

Masana'antar semiconductor na ƙasarmu da masana'antar panel suna kula da babban matakin wadata. Nitrogen trifluoride, a matsayin makawa kuma mafi girma-girma na musamman na iskar gas a cikin samarwa da sarrafa bangarori da semiconductor, yana da sararin kasuwa.

Gas ɗin lantarki na musamman wanda aka fi amfani da fluorine wanda ya ƙunshisulfur hexafluoride (SF6)tungsten hexafluoride (WF6),carbon tetrafluoride (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) da octafluoropropane (C3F8). Nitrogen trifluoride (NF3) galibi ana amfani dashi azaman tushen furotin don hydrogen fluoride-fluoride iskar gas mai ƙarfi laser lasers. Sashin tasiri (kimanin kashi 25%) na makamashin amsawa tsakanin H2-O2 da F2 ana iya fitar da su ta hanyar radiation laser, don haka Laser HF-OF sune mafi kyawun lasers a tsakanin laser sinadarai.

Nitrogen trifluoride shine kyakkyawan iskar gas mai etching na plasma a cikin masana'antar microelectronics. Don etching silicon da silicon nitride, nitrogen trifluoride yana da mafi girman etching rate da selectivity fiye da carbon tetrafluoride da cakuda carbon tetrafluoride da oxygen, kuma ba shi da wani gurbatawa a saman. Musamman a cikin etching na hadedde kayan da'ira tare da kauri na kasa da 1.5um, nitrogen trifluoride yana da matukar kyau etching kudi da selectivity, barin wani saura a kan saman da etched abu, kuma shi ne mai kyau sosai tsaftacewa wakili. Tare da haɓaka fasahar nanotechnology da babban ci gaban masana'antar lantarki, buƙatunsa zai ƙaru kowace rana.

A matsayin nau'in iskar gas na musamman mai ɗauke da fluorine, nitrogen trifluoride (NF3) shine mafi girman kayan iskar gas na musamman na lantarki a kasuwa. Ba shi da ƙarancin sinadarai a cikin ɗaki, yana aiki fiye da iskar oxygen, ya fi kwanciyar hankali fiye da fluorine, kuma yana da sauƙin ɗauka a babban zafin jiki.

Nitrogen trifluoride ana amfani dashi galibi azaman iskar plasma etching gas da wakili mai tsabtace ɗaki, wanda ya dace da filayen masana'anta kamar kwakwalwan kwastomomi, nunin panel, fiber na gani, sel na hotovoltaic, da sauransu.

Idan aka kwatanta da sauran iskar gas mai ɗauke da fluorine, nitrogen trifluoride yana da fa'idodi na saurin amsawa da inganci, musamman a cikin etching na kayan da ke ɗauke da silicon kamar silicon nitride, yana da ƙimar etching mai girma da zaɓin zaɓi, barin babu saura a saman abin da aka kwaikwayi, kuma yana da kyau sosai, kuma ba shi da gurɓataccen tsari.