Mafi girman adadin Iskar Gas ta Musamman ta Lantarki - Nitrogen Trifluoride NF3

Masana'antar semiconductor da masana'antar panel a ƙasarmu suna da babban ci gaba. Nitrogen trifluoride, a matsayin iskar gas ta lantarki mai mahimmanci kuma mafi girma a cikin samarwa da sarrafa bangarori da semiconductor, yana da faffadan fili a kasuwa.

Iskar gas ta lantarki ta musamman da aka fi amfani da ita wacce ke ɗauke da fluorine sun haɗa dahexafluoride na sulfur (SF6)tungsten hexafluoride (WF6),carbon tetrafluoride (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) da octafluoropropane (C3F8). Ana amfani da nitrogen trifluoride (NF3) galibi a matsayin tushen fluorine don lasers masu ƙarfi na hydrogen fluoride-fluoride na iskar hydrogen. Sashe mai tasiri (kimanin 25%) na kuzarin amsawa tsakanin H2-O2 da F2 za a iya fitar da shi ta hanyar hasken laser, don haka lasers HF-OF sune lasers mafi kyau a tsakanin lasers masu sinadarai.

Nitrogen trifluoride iskar gas ce mai kyau a masana'antar microelectronics. Don yin etching silicon da silicon nitride, nitrogen trifluoride yana da mafi girman ƙimar etching da zaɓi fiye da carbon tetrafluoride da cakuda carbon tetrafluoride da oxygen, kuma ba shi da gurɓataccen abu a saman. Musamman a cikin etching na kayan da'ira masu kauri ƙasa da 1.5um, nitrogen trifluoride yana da kyakkyawan ƙimar etching da zaɓi, yana barin babu wani abu a saman abin da aka etching, kuma yana da kyau sosai wajen tsaftacewa. Tare da haɓaka fasahar nano da haɓaka masana'antar lantarki, buƙatarta za ta ƙaru kowace rana.

A matsayin wani nau'in iskar gas na musamman mai ɗauke da fluorine, nitrogen trifluoride (NF3) ita ce babbar samfurin iskar gas ta lantarki a kasuwa. Yana da sinadarai a yanayin zafi na ɗaki, yana aiki fiye da iskar oxygen, yana da karko fiye da fluorine, kuma yana da sauƙin sarrafawa a yanayin zafi mai yawa.

Ana amfani da Nitrogen trifluoride galibi azaman mai tsaftace iskar gas ta plasma da kuma mai tsaftace ɗakin amsawa, wanda ya dace da filayen masana'antu kamar guntuwar semiconductor, nunin faifai mai faɗi, zaruruwan gani, ƙwayoyin photovoltaic, da sauransu.

Idan aka kwatanta da sauran iskar gas mai dauke da fluorine, nitrogen trifluoride yana da fa'idodin saurin amsawa da inganci mai yawa, musamman a cikin goge kayan da ke dauke da silicon kamar silicon nitride, yana da saurin gogewa da zaɓi mai yawa, ba ya barin wani abu a saman abin da aka goge, kuma yana da kyau wajen tsaftacewa, kuma ba ya gurɓata saman kuma yana iya biyan buƙatun tsarin sarrafawa.