Gas ɗin lantarki na musamman mai ɗauke da fluorine gama gari sun haɗa dasulfur hexafluoride (SF6)tungsten hexafluoride (WF6),carbon tetrafluoride (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) da octafluoropropane (C3F8).
Tare da haɓaka fasahar nanotechnology da babban ci gaban masana'antar lantarki, buƙatunsa zai ƙaru kowace rana. Nitrogen trifluoride, a matsayin wanda ba makawa kuma mafi girma-amfani da iskar gas na musamman a cikin samarwa da sarrafa bangarori da semiconductor, yana da sararin kasuwa.
A matsayin nau'in iskar gas na musamman mai ɗauke da fluorine,nitrogen trifluoride (NF3)shine samfurin gas na musamman na lantarki tare da mafi girman ƙarfin kasuwa. Ba shi da ƙarancin sinadarai a cikin ɗaki, yana aiki fiye da iskar oxygen a yanayin zafi mai yawa, ya fi kwanciyar hankali fiye da fluorine, kuma mai sauƙin ɗauka. Nitrogen trifluoride ana amfani dashi galibi azaman iskar plasma etching da wakili mai tsabtace ɗaki, kuma ya dace da filayen masana'anta na kwakwalwan kwamfuta na semiconductor, nunin panel na lebur, fiber na gani, ƙwayoyin photovoltaic, da sauransu.
Idan aka kwatanta da sauran iskar gas mai ɗauke da fluorine,nitrogen trifluorideyana da abũbuwan amfãni daga cikin sauri dauki da kuma high dace. Musamman a cikin etching na silicon-dauke da kayan kamar silicon nitride, yana da wani babban etching kudi da zažužžukan, barin babu wani saura a saman da etched abu. Har ila yau, wakili ne mai kyau mai tsaftacewa kuma ba shi da gurɓatacce a saman, wanda zai iya biyan bukatun tsarin sarrafawa.
Lokacin aikawa: Satumba-14-2024
