Gama gari-iri-iri-dauke da gases na lantarki sun hada dasulfur hexafluoride (sf6), tunsten hexafluoride (wf6),Carbon Tetrafluhlide (CF4), Triflorooromethane (chf3), nitrogen barluorde (nf3), hexfluoroethane (C2F6) da ocafluoropropane (C3F8).
Tare da ci gaban Nanotechnology da manyan ci gaban masana'antar lantarki, bukatarsa zata karu kowace rana. Nitrogen Briflulaadide, a matsayin da ba makawa da mafi mahimmanci - gas na musamman gas na musamman a cikin samarwa da sarrafa bangarori da semicontuctors, yana da babban kasuwa.
A matsayin nau'in gas-ficewanitrogen safmeorde (nf3)shine samfurin gas na lantarki na lantarki tare da karfin kasuwar kasuwa. Yana da ereter a zazzabi a daki, fiye da oxygen a babban zazzabi, mafi tsayayye fiye da filaye, da sauƙi don kulawa. Ana amfani da mafi yawan kayan aikin nitrogen a matsayin mai da aka yi amfani da shi a cikin Wakilan Chemon, kuma ya dace da filayen masana'antu na semicondantor, sel na gani, ƙwayoyin daukar hoto, da sauransu.
Idan aka kwatanta da sauran gases-da ke ɗauke da gas na lantarki,nitrogen briflorideyana da fa'idodi na sauri da kuma babban aiki. Musamman ma a cikin etching na kayan silicon-dauke da silicon nitride, yana da babban karancin etching da kuma bukatar wani saura a saman abin da etched abu. Hakanan wakili ne mai kyau kuma bashi da gurbataccen zuwa farfajiya, wanda zai iya biyan bukatun tsarin sarrafawa.
Lokaci: Sat-14-2224
