Iskar gas ta musamman ta lantarki da aka fi amfani da ita - nitrogen trifluoride

Iskar gas ta lantarki ta musamman da ke ɗauke da fluorine ta haɗa dahexafluoride na sulfur (SF6)tungsten hexafluoride (WF6),carbon tetrafluoride (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) da octafluoropropane (C3F8).

Tare da ci gaban fasahar nano da kuma babban ci gaban masana'antar lantarki, buƙatarta za ta ƙaru kowace rana. Nitrogen trifluoride, a matsayin iskar gas ta lantarki mai mahimmanci kuma mafi girma da ake amfani da ita wajen samarwa da sarrafa bangarori da semiconductors, yana da faffadan fili a kasuwa.

A matsayin wani nau'in iskar gas na musamman mai ɗauke da sinadarin fluorine,nitrogen trifluoride (NF3)shine samfurin iskar gas na musamman na lantarki wanda ke da mafi girman ƙarfin kasuwa. Yana da sinadarai marasa aiki a zafin ɗaki, yana aiki fiye da iskar oxygen a zafin jiki mai yawa, yana da karko fiye da fluorine, kuma yana da sauƙin sarrafawa. Ana amfani da Nitrogen trifluoride galibi azaman iskar etching plasma da kuma wakili na tsaftacewa na ɗakin amsawa, kuma ya dace da filayen kera guntu na semiconductor, nunin faifai, zaruruwan gani, ƙwayoyin photovoltaic, da sauransu.

Idan aka kwatanta da sauran iskar gas mai ɗauke da sinadarin fluorine,nitrogen trifluorideyana da fa'idodin saurin amsawa da inganci mai yawa. Musamman a cikin goge kayan da ke ɗauke da silicon kamar silicon nitride, yana da saurin gogewa da zaɓi mai yawa, ba ya barin wani abu a saman abin da aka goge. Hakanan yana da kyau sosai wajen tsaftacewa kuma ba shi da gurɓataccen abu a saman, wanda zai iya biyan buƙatun tsarin sarrafawa.