Lantarkigas na musammanbabban reshe ne na gas na musamman. Sun shiga kusan dukkanin hanyoyin samar da kayan aikin semicondik don samar da masana'antu na lantarki kamar da'irar da ke tattare da keɓance, da sel na allurar allon, da sel lebur.

A cikin fasahar semiconductor, an yi amfani da gas mai zurfi sosai. A halin yanzu, a cikin kasuwar gas na lantarki, frileine-dauke da asusun gas na lantarki na kusan 30% na jimlar. Fluroine-dauke da gas na lantarki muhimmin bangare ne na gas na lantarki na musamman a fagen bayanan bayanan lantarki. Ana amfani dasu azaman wakilan tsabtatawa da etching, kuma ana iya amfani dasu kamar yadda yake, kayan samar da fim, da sauransu a cikin wannan labarin, da sauran marubucin zai ɗauke ku don fahimtar gas mai ɗaukar hoto.

Ana amfani da masu zuwa mafi yawan gas

Nitrogen TriflUoride (nf3): An yi amfani da gas don tsabtace da cire adibas, yawanci ana amfani dashi don tsabtace ɗakunan da suka yi da kayan aiki.

Sulfur hexafluoride (sf6): Wakili mai fa'ida da aka yi amfani da shi a cikin hanyoyin shiga na oxide kuma a matsayin mai iskar gas don cike gurbin da kafofin watsa labarai.

Hyrogen Flororide (HF): Amfani da shi don cire etchan daga silicon surface kuma a matsayin etchant don etchant don etchanting silching da sauran kayan.

Nitrogen Flororide (NF): Amfani da kayan attican kamar silicon nitride (zunubi) da aluminum nitride (AlN).

Trifluoromethane (chf3) daTetrafluoromethane (CF4): Anyi amfani da kayan aikin 'yan wasan kwaikwayo kamar su silicon mroraride da aluminium m.

Koyaya, gas mai ƙoshin haske yana da wasu haɗarin, gami da guba, lalata, da cin wuta.

Guba

Wasu gas masu guba-mai guba ne, kamar su hf fruoride (hf), wanda tururi mai ban sha'awa yana da haushi sosai ga fata da numfashi na numfashi.

Matsi

Hydrogen Fluride kuma wasu ƙwayoyin cuta suna lalata sosai kuma suna iya haifar da mummunar lalacewar fata, idanu da jijiyoyin jiki.

Harshen wuta

Wasu fitilu suna da harshen wuta kuma suna amsawa tare da iskar oxygen ko ruwa a cikin iska don sakin zafin wuta da gas mai guba, wanda zai iya haifar da wuta ko fashewa.

Haɗin kai

Wasu gas masu fashewa suna fashewar a ƙarƙashin matsin lamba kuma suna buƙatar kulawa ta musamman yayin amfani da adanawa.

Tasiri kan muhalli

Gases-dauke da gas mai tsayi da dabi'u na GWP, wanda ke da sakamako mai lalacewa a kan Layer na ATMOSPHERIC OZKE kuma yana iya haifar da gurbata yanayin yanayin duniya.

Aikace-aikacen gas cikin filayen da ke fitowa kamar su lantarki ya ci gaba da zurfafa, yana kawo sabon buƙatu ga gas na masana'antu. Dangane da adadin sabbin hanyoyin samar da kayan lantarki da bangarori masu kyau a cikin 'yan masana'antar masu zuwa, da kuma masana'antar gas na gida zasu iya amfani da shi a cikin babban rabo.