Lantarkigas na musammanwani muhimmin reshe ne na iskar gas na musamman. Suna shiga kusan kowace hanyar haɗin gwiwar samar da semiconductor kuma suna da mahimmancin albarkatun ƙasa don samar da masana'antu na lantarki kamar su manyan sikelin haɗaɗɗun da'irori, na'urorin nunin tebur, da ƙwayoyin hasken rana.

A cikin fasahar semiconductor, ana amfani da iskar gas mai ɗauke da fluorine. A halin yanzu, a kasuwar iskar gas ta duniya, iskar gas ɗin da ke ɗauke da fluorine ya kai kusan kashi 30% na jimillar. Gas na lantarki mai ɗauke da fluorine wani muhimmin sashi ne na iskar gas na musamman a fagen kayan bayanan lantarki. Ana amfani da su ne a matsayin kayan tsaftacewa da kuma abubuwan cirewa, kuma ana iya amfani da su azaman dopants, kayan samar da fim, da sauransu.

Gas masu ɗauke da fluorine galibi ana amfani da waɗannan abubuwan

Nitrogen trifluoride (NF3): Gas da ake amfani da shi don tsaftacewa da cire adibas, yawanci ana amfani da su don tsabtace ɗakunan amsawa da saman kayan aiki.

Sulfur hexafluoride (SF6): Wani wakili mai ƙyalƙyali da aka yi amfani da shi a cikin tafiyar matakai na oxide da kuma azaman iskar gas don cika kafofin watsa labaru.

Hydrogen fluoride (HF): Ana amfani da shi don cire oxides daga saman siliki kuma azaman etching don etching silicon da sauran kayan.

Nitrogen fluoride (NF): Ana amfani dashi don cire kayan kamar silicon nitride (SiN) da aluminum nitride (AlN).

Trifluoromethane (CHF3) datetrafluoromethane (CF4): Ana amfani da su don cire kayan fluoride kamar silicon fluoride da aluminum fluoride.

Duk da haka, iskar da ke ɗauke da fluorine suna da wasu haɗari, waɗanda suka haɗa da guba, lalata, da ƙonewa.

Guba

Wasu iskar da ke dauke da sinadarin fluorine masu guba ne, irin su hydrogen fluoride (HF), wanda tururinsa na da matukar fusata fata da kuma na numfashi da illa ga lafiyar dan Adam.

Lalata

Hydrogen fluoride da wasu fluoride suna da lalata sosai kuma suna iya haifar da mummunan lahani ga fata, idanu da numfashi.

Flammability

Wasu fluoride suna ƙonewa kuma suna amsawa tare da iskar oxygen ko ruwa a cikin iska don sakin zafi mai zafi da gas mai guba, wanda zai iya haifar da wuta ko fashewa.

Hatsarin matsa lamba

Wasu iskar gas masu fashewa suna fashewa a ƙarƙashin matsanancin matsin lamba kuma suna buƙatar kulawa ta musamman lokacin amfani da adana su.

Tasiri kan muhalli

Gas ɗin da ke ɗauke da fluorine suna da babban yanayin rayuwa da ƙimar GWP, waɗanda ke da illa ga yanayin sararin samaniyar sararin samaniya kuma suna iya haifar da ɗumamar yanayi da gurɓacewar muhalli.

Aiwatar da iskar gas a cikin filayen da ke tasowa kamar na'urorin lantarki na ci gaba da zurfafawa, yana kawo adadin sabbin buƙatun iskar gas na masana'antu. Dangane da babban adadin sabbin damar samar da manyan kayan aikin lantarki kamar semiconductor da na'urorin nuni a babban yankin kasar Sin a cikin 'yan shekaru masu zuwa, da kuma bukatu mai karfi na musanya kayan sinadarai na lantarki, masana'antar iskar gas ta cikin gida za ta shigo da su. wani babban girma kudi.